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| Anatech LTD |   |
YES Yield Engineering Systems |   | |
Tegal Corp. |   | |
AST Products |   | |
INFICON, Inc. |   | |
ESC |   | |
MARCH Instruments, Inc. |   | |
4th State, Inc. |   | |
Axic Inc. |   | |
Plasma Etch Inc |   | |
Structure Probe, Inc. / SPI Supplies |   | |
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