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| Anatech LTD |   |
| YES Yield Engineering Systems |   | |
| Tegal Corp. |   | |
| AST Products |   | |
| INFICON, Inc. |   | |
| ESC |   | |
| MARCH Instruments, Inc. |   | |
| 4th State, Inc. |   | |
| Axic Inc. |   | |
| Plasma Etch Inc |   | |
| Structure Probe, Inc. / SPI Supplies |   | |
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